Performance of a Diaphragmed Microlens for a Packaged Microspectrometer

Performance of a Diaphragmed Microlens for a Packaged Microspectrometer

This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length a...

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Bibliographic Details
Main Authors: Laura Marcu, Martin Gundersen, Eun-Sok Kim, Thanassis Papaioannou, Joe Lo, Shih-Jui Chen, Qiyin Fang
Format: Article
Language:English
Published: MDPI AG 2009-02-01
Series:Sensors
Subjects:
Microoptics
microlens
MEMS
spectroscopy
Gaussian propagation
Online Access:http://www.mdpi.com/1424-8220/9/2/859/

Internet

http://www.mdpi.com/1424-8220/9/2/859/

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