Lamb Wave AlN Micromechanical Filters Integrated With On-chip Capacitors for RF Front-End Architectures
This paper reports on the implementation of an ultraminiature 140 MHz narrowband filter based on aluminum nitride Lamb wave resonators. Monolithically integrated with a pair of on-chip capacitors and cascaded with a pair of inductors, the filter is well matched to 50 ohm, showing a remarkably high p...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2015-01-01
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| Series: | IEEE Journal of the Electron Devices Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7072538/ |