Eliminating of the Residual Stresses Effect in the Fixed-Fixed End Type MEMS Switches by Piezoelectric Layers
In this paper, a novel method has been developed to eliminate the tensile or compressive residual stresses effects that have been created due to the fabrication sequence. In the developed model, the tensile or compressive residual stresses in the fixed-fixed end type MEMS switches have been eliminat...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2006-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_06/P_64.pdf |