A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling
This paper presents the synthesis and evaluation of a carbon molecular sieve membrane (CMSM) grown inside a MEMS-fabricated μ-preconcentrator for sampling highly volatile organic compounds. An array of µ-pillars measuring 100 µm in diameter and 250 µm in height were fabricated inside a microfluidic...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-05-01
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| Series: | Chemosensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2227-9040/9/5/104 |