Clean-Room Lithographical Processes for the Fabrication of Graphene Biosensors

Clean-Room Lithographical Processes for the Fabrication of Graphene Biosensors

This work is on developing clean-room processes for the fabrication of electrolyte-gate graphene field-effect transistors at the wafer scale for biosensing applications. Our fabrication process overcomes two main issues: removing surface residues after graphene patterning and the dielectric passivat...

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Bibliographic Details
Main Authors: Patrícia D. Cabral, Telma Domingues, George Machado Jr., Alexandre Chicharo, Fátima Cerqueira, Elisabete Fernandes, Emília Athayde, Pedro Alpuim, Jérôme Borme
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Materials
Subjects:
graphene
microfabrication
biosensors
dielectric passivation
clean surfaces
Online Access:https://www.mdpi.com/1996-1944/13/24/5728

Internet

https://www.mdpi.com/1996-1944/13/24/5728

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