Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films

Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films

Optically transparent, colorless Al-O-N and Al-Si-O-N coatings with discretely varied O and Si contents were fabricated by reactive direct current magnetron sputtering (R-DCMS) from elemental Al and Si targets and O2 and N2 reactive gases. The Si/Al content was adjusted through the electrical power...

Full description

Bibliographic Details
Main Authors: Maria Fischer, Mathis Trant, Kerstin Thorwarth, Rowena Crockett, Jörg Patscheider, Hans Josef Hug
Format: Article
Language:English
Published: Taylor & Francis Group 2019-12-01
Series:Science and Technology of Advanced Materials
Subjects:
aluminum oxynitride
al-o-n
aluminum silicon oxynitride
al-si-o-n
coatings
thin films
transparent
hard
microstructure
reactive sputtering
Online Access:http://dx.doi.org/10.1080/14686996.2019.1666425

Internet

http://dx.doi.org/10.1080/14686996.2019.1666425

Similar Items