Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography
This paper presents a theoretical demonstration of diverse microstructure fabrication by changing the angle of incidence of a six-beam laser interference lithography system. Different combinations are formed with transverse electric (TE) and transverse magnetic (TM) polarizations and various microst...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-01-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/11/1/62 |