Structural Study of Thin Amorphous SiO2 and Si3N4 Films by the Grazing Incidence X-Ray Scattering (GIXS) Method
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
1999-01-01
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| Series: | High Temperature Materials and Processes |
| Online Access: | https://doi.org/10.1515/HTMP.1999.18.1-2.99 |