Growth of NbC Thin Film Using CH<sub>4</sub> as a Carbon Source and Reducing Agent

Growth of NbC Thin Film Using CH<sub>4</sub> as a Carbon Source and Reducing Agent

Transition metal carbides (TMCs) have high melting points, hardness, and chemical stabilities in acidic media. In this work, a chemical vapor deposition method using CH<sub>4</sub> as a carbon source and reducing agent was employed to make an NbC film. NbCl<sub>5</sub> carrie...

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Bibliographic Details
Main Authors: Kwan-Woo Kim, Bum Jun Kim, Sang Hoon Lee, Tuqeer Nasir, Hyung Kyu Lim, Ik Jun Choi, Byung Joo Jeong, Jaeyeong Lee, Hak Ki Yu, Jae-Young Choi
Format: Article
Language:English
Published: MDPI AG 2018-10-01
Series:Coatings
Subjects:
transition metal carbides (TMCs)
chemical vapor deposition (CVD)
NbC film
reducing agent
<i>c</i>-plane sapphire
preferential orientation
domain matching epitaxy (DME)
Online Access:https://www.mdpi.com/2079-6412/8/11/379

Internet

https://www.mdpi.com/2079-6412/8/11/379

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