Focal Surface Detection of High Numerical Aperture Objective Lens Based on Differential Astigmatic Method
Defocus detection technology is the key technology in the fields of laser direct writing, optical disc storage, and high-precision lithography, which directly affects the accuracy of line drawing. In this paper, using the principle of astigmatic method, combined with differential technology, a nano-...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9484707/ |