Segmented Control of Electrostatically Actuated Bimorph Beams

This research focused on improving the control and sensing of electrostatically actuated, large deflection bimorph beams for optical beam steering. Current iterations of designs utilize a ‘zipper’ beam and have demonstrated large deflection angles. However, with these devices precise control and def...

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Bibliographic Details
Main Authors: Kullen Waggoner, Robert Lake, Lavern Starman, John Walton
Format: Article
Published: MDPI AG 2017-08-01
Online Access: