Covalent nitrogen doping in molecular beam epitaxy-grown and bulk WSe2

Covalent p-type doping of WSe2 thin films grown by molecular beam epitaxy and WSe2 exfoliated from bulk crystals is achieved via remote nitrogen plasma exposure. X-ray photoelectron and Raman spectroscopies indicate covalently bonded nitrogen in the WSe2 lattice as well as tunable nitrogen concentra...

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Bibliographic Details
Main Authors: Ava Khosravi, Rafik Addou, Christopher M. Smyth, Ruoyu Yue, Christopher R. Cormier, Jiyoung Kim, Christopher L. Hinkle, Robert M. Wallace
Format: Article
Language:English
Published: AIP Publishing LLC 2018-02-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/1.5002132