Contact and contactless porous silicon parameter measurement techniques
In this work we have used contact and contactless techniques to measure the electrical resistivity of single crystal silicon wafers with porous layers of variable thickness synthesized on the surface. The porous layers have been synthesized on the surfaces of single crystal wafers...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Pensoft Publishers
2018-12-01
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| Series: | Modern Electronic Materials |
| Online Access: | https://moem.pensoft.net/article/39503/download/pdf/ |