Au Doping ZnO Nanosheets Sensing Properties of Ethanol Gas Prepared on MEMS Device
Sensitivity of the Micro Electro Mechanical System (MEMS) device ZnO nanosheets sensor and the Au doped ZnO nanosheets sensor has been investigated. The ZnO samples have been prepared using Hydrothermal synthesis at 90 °C. The prepared ZnO nanostructure is tested for structural morphology and crysta...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-09-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/10/10/945 |