Toward Defect-Free Doping by Self-Assembled Molecular Monolayers: The Evolution of Interstitial Carbon-Related Defects in Phosphorus-Doped Silicon

Toward Defect-Free Doping by Self-Assembled Molecular Monolayers: The Evolution of Interstitial Carbon-Related Defects in Phosphorus-Doped Silicon

Bibliographic Details
Main Authors: Xuejiao Gao, Bin Guan, Abdelmadjid Mesli, Kaixiang Chen, Limin Sun, Yaping Dan
Format: Article
Language:English
Published: American Chemical Society 2019-02-01
Series:ACS Omega
Online Access:http://dx.doi.org/10.1021/acsomega.8b03372

Internet

http://dx.doi.org/10.1021/acsomega.8b03372

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