Resonant Varifocal Micromirror with Piezoresistive Focus Sensor

Resonant Varifocal Micromirror with Piezoresistive Focus Sensor

This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning range of a focal length. A piezoresistor is used to...

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Bibliographic Details
Main Authors: Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya, Kazuhiro Hane
Format: Article
Language:English
Published: MDPI AG 2016-03-01
Series:Micromachines
Subjects:
varifocal mirror
piezoresistor
resonant vibration
microelectromechanical systems
Online Access:http://www.mdpi.com/2072-666X/7/4/57

Internet

http://www.mdpi.com/2072-666X/7/4/57

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