Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction

Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction

We show that nanometer-scale dielectric thin films can act as efficient electromechanical transducers to simultaneously drive and sense the vibration of the first flexural mode of micro/nano-cantilevers. Here, 16 μm-long, 5 μm-wide and 350 nm-thick cantilevers are actuated by a 15 nm-thick silicon n...

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Bibliographic Details
Main Authors: Cécile Fuinel, Fabrice Mathieu, Bernard Legrand
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
MEMS
high-K
dielectric actuation
charge detection
Online Access:https://www.mdpi.com/2504-3900/1/4/300

Internet

https://www.mdpi.com/2504-3900/1/4/300

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