The Effect of Displacement Constraints on the Failure of MEMS Tuning Fork Gyroscopes under Shock Impact

Displacement constraints such as stops are widely used in engineering to improve the shock resistance of microelectromechanical system (MEMS) tuning fork gyroscopes. However, in practical applications, it has been found that unexpected breakage can occur on MEMS tuning fork gyroscopes with stops. In...

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Bibliographic Details
Main Authors: Jiangkai Lian, Jianhua Li, Lixin Xu
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/10/5/343