The superior properties of CrN coatings prepared by high power pulsed reactive magnetron sputtering
In this paper, we investigate the properties of chromium nitride (CrN) coating prepared using a high power magnetron sputtering (HiPIMS) technique. As a comparison, CrN coating prepared using a direct current magnetron sputtering (DCMS) technique is also studied. The crystal structure, surface and c...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2020-01-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5132783 |