Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> Target

Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> Target

Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB<sub>2</sub>-MoSi<sub>2</sub> targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy...

Full description

Bibliographic Details
Main Authors: Philipp Kiryukhantsev-Korneev, Alina Sytchenko, Yuriy Pogozhev, Stepan Vorotilo, Anton Orekhov, Pavel Loginov, Evgeny Levashov
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Materials
Subjects:
magnetron sputtering
coating
ZrB<sub>2</sub>
MoSi<sub>2</sub>
Zr-Mo-Si-B-(N)
structure
Online Access:https://www.mdpi.com/1996-1944/14/8/1932

Internet

https://www.mdpi.com/1996-1944/14/8/1932

Similar Items