3D Layout of Interdigital Transducers for High Frequency Surface Acoustic Wave Devices

3D Layout of Interdigital Transducers for High Frequency Surface Acoustic Wave Devices

The development of mobile communication sets higher demands on high frequency surface acoustic wave (SAW) devices. The layout of interdigital transducers (IDT) in SAW devices is in plane and the traditional methods of improving frequency for SAW devices are the increase of acoustic velocity and the...

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Bibliographic Details
Main Authors: Junyao Shen, Jingting Luo, Sulei Fu, Rongxuan Su, Weibiao Wang, Fei Zeng, Cheng Song, Feng Pan
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
High frequency
interdigital transducer
surface acoustic wave
three-dimensional layout
Online Access:https://ieeexplore.ieee.org/document/9133378/

Internet

https://ieeexplore.ieee.org/document/9133378/

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