Alteration of the chemical composition of fused silica surfaces via combined hydrogenous plasma treatment and UV laser irradiation
In this contribution, we report on the influence of nitrogen-hydrogen plasma treatment on the chemical composition of fused silica surfaces with and without additional argon fluoride laser irradiation. Therefore, the compositions of pristine and plasma treated fused silica samples were investigated...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-03-01
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| Series: | Journal of Non-Crystalline Solids: X |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590159121000017 |