Effect of Polyimide Variation and its Curing Temperature on CMOS Based Capacitive Humidity Sensor and Characterization of Integrated Heater
This paper reports humidity sensor using CMOS fabrication technology integrated with micro heater. Vertical capacitive sensor has been chosen having better nominal capacitance. Three different variants of micro heaters were fabricated and compared on both TiN and Poly-phosphorous doped silicon. The...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_09/P_421.pdf |