Properties of anodic oxides grown on a hafnium–tantalum–titanium thin film library

A ternary thin film combinatorial materials library of the valve metal system Hf–Ta–Ti obtained by co-sputtering was studied. The microstructural and crystallographic analysis of the obtained compositions revealed a crystalline and textured surface, with the exception of compositions with Ta concent...

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Bibliographic Details
Main Authors: Andrei Ionut Mardare, Alfred Ludwig, Alan Savan, Achim Walter Hassel
Format: Article
Language:English
Published: Taylor & Francis Group 2014-01-01
Series:Science and Technology of Advanced Materials
Online Access:http://dx.doi.org/10.1088/1468-6996/15/1/015006