Properties of anodic oxides grown on a hafnium–tantalum–titanium thin film library
A ternary thin film combinatorial materials library of the valve metal system Hf–Ta–Ti obtained by co-sputtering was studied. The microstructural and crystallographic analysis of the obtained compositions revealed a crystalline and textured surface, with the exception of compositions with Ta concent...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Taylor & Francis Group
2014-01-01
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Series: | Science and Technology of Advanced Materials |
Online Access: | http://dx.doi.org/10.1088/1468-6996/15/1/015006 |