Reaction Force Compensator for High-Speed Precision Stage of Laser Direct Imaging Process
Recently, laser direct imaging (LDI) process has become popular as a substitute for lithography in flexible printed circuit board (FPCB) manufacturing industry. However, repeated motion of the process equipment causes residual vibration in a transient state when the stage accelerates or decelerates....
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2018-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2018/8324539 |