Effects of Negative Bias Voltage and Ratio of Nitrogen and Argon on the Structure and Properties of NbN Coatings Deposited by HiPIMS Deposition System

Effects of Negative Bias Voltage and Ratio of Nitrogen and Argon on the Structure and Properties of NbN Coatings Deposited by HiPIMS Deposition System

The NbNx>1 coatings were deposited on Si wafer and SUS 304 stainless steel substrates by a high power impulse magnetron sputtering (HiPIMS) system at various bias voltages and the ratios of nitrogen and argon (N2/Ar). By virtue of electron probe microanalysis (EPMA), X-ray diffraction pattern...

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Bibliographic Details
Main Authors: Jicheng Ding, Tengfei Zhang, Haijuan Mei, Je Moon Yun, Seong Hee Jeong, Qimin Wang, Kwang Ho Kim
Format: Article
Language:English
Published: MDPI AG 2017-12-01
Series:Coatings
Subjects:
NbNx&gt
1 coating
HiPIMS
bias voltage
N2/Ar ratio
microstructure
mechanical properties
Online Access:https://www.mdpi.com/2079-6412/8/1/10

Internet

https://www.mdpi.com/2079-6412/8/1/10

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