Breakthroughs in Photonics 2013: X-Ray Optics

This review discusses the latest advances in extreme ultraviolet/X-ray optics development, which are motivated by the availability and demands of new X-ray sources and scientific and industrial applications. Among the breakthroughs highlighted are the following: i) fabrication, metrology, and mounti...

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Bibliographic Details
Main Author: Regina Soufli
Format: Article
Language:English
Published: IEEE 2014-01-01
Series:IEEE Photonics Journal
Subjects:
EUV
Online Access:https://ieeexplore.ieee.org/document/6807862/