Development and plasma characterization of an 850 MHz surface-wave plasma source
This work presents a simple design of surface wave plasma (SWP) source based on cylindrical cavity excited by ∼ 850 MHz ultra high frequency (UHF) wave. The cavity equipped with four rectangular slots demonstrates the usefulness of a large aperture coupling for plasma generation using top-wall excit...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4995442 |