Design of a Capacitive SOI Micromachined Accelerometer
A capacitive micromachined accelerometer based on the technique of silicon on insulator, is designed in this paper. The proposed microaccelerometer is designed to obtain good electrical performance and radioresistance in order to make the accelerometer integrate with the CMOS chip. The performance o...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_09/P_412.pdf |