Low-Pressure Small MEMS Accelerometer Using Sigma-Delta Modulation
Encapsulation of MEMS accelerometers in vacuum is advantageous, since it allows integration with other sensors, leading to size and cost reduction. One technique to operate MEMS accelerometers in vacuum is the use of closed-loop Sigma-Delta modulation, which has many advantages. In this paper, the d...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-11-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/1029 |