Low-Pressure Small MEMS Accelerometer Using Sigma-Delta Modulation

Low-Pressure Small MEMS Accelerometer Using Sigma-Delta Modulation

Encapsulation of MEMS accelerometers in vacuum is advantageous, since it allows integration with other sensors, leading to size and cost reduction. One technique to operate MEMS accelerometers in vacuum is the use of closed-loop Sigma-Delta modulation, which has many advantages. In this paper, the d...

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Bibliographic Details
Main Authors: Vasco Lima, Jorge Cabral, Burkhard Kuhlmann, Luis Alexandre Rocha
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
MEMS
accelerometer
Sigma-Delta
low-pressure
Online Access:https://www.mdpi.com/2504-3900/2/13/1029
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spelling doaj-b4d2e2c13fea435e952f3e3e574b9b9d2020-11-25T01:27:05ZengMDPI AGProceedings2504-39002018-11-01213102910.3390/proceedings2131029proceedings2131029Low-Pressure Small MEMS Accelerometer Using Sigma-Delta ModulationVasco Lima0Jorge Cabral1Burkhard Kuhlmann2Luis Alexandre Rocha3CMEMS-UM, University of Minho, 4800-058 Guimarães, PortugalALGORITMI CENTER, University of Minho, 4800-058 Guimarães, PortugalAutomotive Electronics, Robert Bosch GmbH, 72762 Reutlingen, GermanyCMEMS-UM, University of Minho, 4800-058 Guimarães, PortugalEncapsulation of MEMS accelerometers in vacuum is advantageous, since it allows integration with other sensors, leading to size and cost reduction. One technique to operate MEMS accelerometers in vacuum is the use of closed-loop Sigma-Delta modulation, which has many advantages. In this paper, the design of a vacuum encapsulated small size MEMS accelerometer (0.2 mm<sup>2</sup>) and the preliminary measured results are presented. Experimental devices were fabricated and operated in 2nd and 3rd order Sigma-Delta modulators, achieving a noise figure of 389 µg/√Hz for a bandwidth of 200 Hz and a measurement range of at least ±1 g.https://www.mdpi.com/2504-3900/2/13/1029MEMSaccelerometerSigma-Deltalow-pressure
collection DOAJ
language English
format Article
sources DOAJ
author Vasco Lima
Jorge Cabral
Burkhard Kuhlmann
Luis Alexandre Rocha
spellingShingle Vasco Lima
Jorge Cabral
Burkhard Kuhlmann
Luis Alexandre Rocha
Low-Pressure Small MEMS Accelerometer Using Sigma-Delta Modulation
Proceedings
MEMS
accelerometer
Sigma-Delta
low-pressure
author_facet Vasco Lima
Jorge Cabral
Burkhard Kuhlmann
Luis Alexandre Rocha
author_sort Vasco Lima
title Low-Pressure Small MEMS Accelerometer Using Sigma-Delta Modulation
title_short Low-Pressure Small MEMS Accelerometer Using Sigma-Delta Modulation
title_full Low-Pressure Small MEMS Accelerometer Using Sigma-Delta Modulation
title_fullStr Low-Pressure Small MEMS Accelerometer Using Sigma-Delta Modulation
title_full_unstemmed Low-Pressure Small MEMS Accelerometer Using Sigma-Delta Modulation
title_sort low-pressure small mems accelerometer using sigma-delta modulation
publisher MDPI AG
series Proceedings
issn 2504-3900
publishDate 2018-11-01
description Encapsulation of MEMS accelerometers in vacuum is advantageous, since it allows integration with other sensors, leading to size and cost reduction. One technique to operate MEMS accelerometers in vacuum is the use of closed-loop Sigma-Delta modulation, which has many advantages. In this paper, the design of a vacuum encapsulated small size MEMS accelerometer (0.2 mm<sup>2</sup>) and the preliminary measured results are presented. Experimental devices were fabricated and operated in 2nd and 3rd order Sigma-Delta modulators, achieving a noise figure of 389 µg/√Hz for a bandwidth of 200 Hz and a measurement range of at least ±1 g.
topic MEMS
accelerometer
Sigma-Delta
low-pressure
url https://www.mdpi.com/2504-3900/2/13/1029
work_keys_str_mv AT vascolima lowpressuresmallmemsaccelerometerusingsigmadeltamodulation
AT jorgecabral lowpressuresmallmemsaccelerometerusingsigmadeltamodulation
AT burkhardkuhlmann lowpressuresmallmemsaccelerometerusingsigmadeltamodulation
AT luisalexandrerocha lowpressuresmallmemsaccelerometerusingsigmadeltamodulation
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