SENSITIVE ELEMENTS FOR CAPACITOR SENSORS OF ACCELERATION
In article variants of designs of sensitive elements for capacitor sensors of acceleration in plane-parallel and volumetric structure are offered. By results of the analysis of functional characteristics the range of sensitivity of sensors is established depending on design parameters.
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
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| Online Access: | https://doklady.bsuir.by/jour/article/view/82 |