Standard CMOS Fabrication of a Sensitive Fully Depleted Electrolyte-Insulator-Semiconductor Field Effect Transistor for Biosensor Applications

Standard CMOS Fabrication of a Sensitive Fully Depleted Electrolyte-Insulator-Semiconductor Field Effect Transistor for Biosensor Applications

Microfabricated semiconductor devices are becoming increasingly relevant for detection of biological and chemical components. The integration of active biological materials together with sensitive transducers offers the possibility of generating highly sensitive, specific, selective and reliable bio...

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Bibliographic Details
Main Authors: Udi Virobnik, Daniela Ullien, Moran Horesh, Andrew Machauf, Ariel Cohen, Amihood Doron, Gil Shalev, Ilan Levy
Format: Article
Language:English
Published: MDPI AG 2009-06-01
Series:Sensors
Subjects:
EISFET
biosensors
CMOS
fully depleted
Online Access:http://www.mdpi.com/1424-8220/9/6/4366/

Internet

http://www.mdpi.com/1424-8220/9/6/4366/

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