A Versatile Technology Based on Deep Reactive Ion Etching and Anodic Bonding for the Application of Micromixers and Microfilters

A Versatile Technology Based on Deep Reactive Ion Etching and Anodic Bonding for the Application of Micromixers and Microfilters

A technology for the fabrication of silicon micromixers and microfilters is presented with their applications being analyzed. The versatility of this technology is observed with the use of two different photolithographic masks where active microfluidic components have been developed. The silicon mic...

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Bibliographic Details
Main Authors: Safae MERZOUK, Michael LEE, Maria J. LOPEZ-MARTINEZ, Nadia ZINE, Abdelhamid ELAISSARI, Chiraz JAAFAR MAALEJ, Mohamed AGOUZOUL, Mourad TAHA JANAN, Jose A. PLAZA, Nicole JAFFREZIC-RENAULT, Abdelhamid ERRACHID
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2014-05-01
Series:Sensors & Transducers
Subjects:
Deep Reactive Ion Etching
Anodic Bonding
Silicon
Micromixer
Microfilter.
Online Access:http://www.sensorsportal.com/HTML/DIGEST/may_2014/Special_issue/P_SI_513.pdf

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http://www.sensorsportal.com/HTML/DIGEST/may_2014/Special_issue/P_SI_513.pdf

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