FEI Helios NanoLab 460F1 FIB-SEM
The FEI Helios NanoLab 460F1 is a highly advanced dual beam FIB-SEM platform for imaging and analytical measurements, transmission electron microscopy (TEM) sample and atom probe (AP) needle preparation, process development and process control. For these purposes, the FEI Helios NanoLab 460F1 combin...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Forschungszentrum Jülich
2016-03-01
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| Series: | Journal of large-scale research facilities JLSRF |
| Online Access: | https://jlsrf.org/index.php/lsf/article/view/105 |