MEMS Acoustic Emission Sensors
This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance or piezoelectricity. The majority of MEMS AE s...
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-12-01
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| Series: | Applied Sciences |
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| Online Access: | https://www.mdpi.com/2076-3417/10/24/8966 |