Preparation of superior IGZO ceramics by two-step sintering for application in IGZO thin film fabrication
The preparation method of advanced ceramics that serve as target materials, has been the key challenge to produce high quality thin film transistors (TFTs) with the desired properties. In this study, a novel two-step sintering (TSS) process was successfully applied to fabricate indium gallium zinc o...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-05-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785419320538 |