Inverse Design of On-Chip Thermally Tunable Varifocal Metalens Based on Silicon Metalines
High-contrast transmitarray (HCTA) metasurfaces, named as metalines in this article, a category of lithographically defined on-chip diffractive elements with minimized scattering loss, enables parallel on-chip optical signal processing. While high-performance devices with different functionalities a...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9430521/ |