An Electrostatically Actuated MEMS Arch Band-Pass Filter
This work presents an investigation of the dynamics of micromachined arches resonators and their potential to be utilized as band-pass filters. The arches are actuated by a DC electrostatic load superimposed to an AC harmonic load. The dynamic response of the arch is studied analytically using a Gal...
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| Format: | Article |
| Language: | English |
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Hindawi Limited
2013-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.3233/SAV-130786 |