AlN-on-Si Square Diaphragm Piezoelectric Micromachined Ultrasonic Transducer with Extended Range of Detection
We present aluminum nitride (AlN) on silicon (Si) CMOS-compatible piezoelectric micromachined ultrasonic transducers (pMUTs) with an extended detection range of up to 140 cm for touchless sensing applications. The reported performance surpasses the current state-of-art for AlN-based pMUTs in terms o...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-11-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/913 |