High-Precision Solvent Vapor Annealing for Block Copolymer Thin Films

High-Precision Solvent Vapor Annealing for Block Copolymer Thin Films

Despite its efficacy in producing well-ordered, periodic nanostructures, the intricate role multiple parameters play in solvent vapor annealing has not been fully established. In solvent vapor annealing a thin polymer film is exposed to a vapor of solvent(s) thus forming a swollen and mobile layer t...

Full description

Bibliographic Details
Main Authors: Gunnar Nelson, Chloe S. Drapes, Meagan A. Grant, Ryan Gnabasik, Jeffrey Wong, Andrew Baruth
Format: Article
Language:English
Published: MDPI AG 2018-05-01
Series:Micromachines
Subjects:
block polymers
self-assembly
thin films
solvent vapor annealing
nanolithography
Online Access:http://www.mdpi.com/2072-666X/9/6/271

Internet

http://www.mdpi.com/2072-666X/9/6/271

Similar Items