An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications

An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications

Despite the development of energy-efficient devices in various applications, microelectromechanical system (MEMS) electrostatic actuators yet require high voltages to generate large displacements. In this respect, electrets exhibiting quasi-permanent electrical charges allow large fixed voltages to...

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Bibliographic Details
Main Authors: Chikako Sano, Manabu Ataka, Gen Hashiguchi, Hiroshi Toshiyoshi
Format: Article
Language:English
Published: MDPI AG 2020-03-01
Series:Micromachines
Subjects:
electrets
low-voltage-driven
acoustic transducers
soi-mems
Online Access:https://www.mdpi.com/2072-666X/11/3/267

Internet

https://www.mdpi.com/2072-666X/11/3/267

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