A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe

A new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformat...

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Bibliographic Details
Main Authors: Rui-Jun Li, Zhen-Xin Chang, Ying-Jun Lei, Zhen-Ying Cheng, Xin Liu, Kuang-Chao Fan, Jing Lv
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8624450/