Shallow <formula formulatype="inline"><tex Notation="TeX">$\hbox{Ti:LiNbO}_{3}$</tex></formula> Strip Waveguide
We report shallow single-mode Ti:LiNbO<sub>3</sub> strip waveguides fabricated on Z-cut congruent LiNbO<sub>3</sub> substrate by a two-step Ti-diffusion process, starting with the diffusion of a homogeneous Ti film at 1020°C for 2 h, followed by the diffusion of Ti...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2012-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/6178755/ |