A Low Spring Constant Piezoresistive Microcantilever for Biological Reagent Detection

This paper introduces a piezoresistive microcantilever with a low spring constant. The microcantilever was fabricated with titanium (Ti) as the piezoresistor, a low spring constant polyimide (PI) layer, and a thin silicon oxide (SiO<sub>2</sub>) layer as the top and bottom passive layers...

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Bibliographic Details
Main Authors: Yuan Tian, Rui Zhao, Yi Liu, Xiaomei Yu
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/11/11/1001