Fabrication and Characterization of In<sub>0.9</sub>Ga<sub>0.1</sub>O EGFET pH Sensors
In this study, the In<sub>0.9</sub>Ga<sub>0.1</sub>O sensing membrane were deposited by using the RF magnetron sputtering at room temperature and combined with commercial MOSFETs as the extended gate field effect transistor (EGFET) pH sensors. The sensing performance of the I...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-08-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/11/8/929 |