Ultra-Short Pulsed Laser Manufacturing and Surface Processing of Microdevices
Ultra-short laser pulses possess many advantages for materials processing. Ultrafast laser has a significantly low thermal effect on the areas surrounding the focal point; therefore, it is a promising tool for micro- and submicro-sized precision processing. In addition, the nonlinear multiphoton abs...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2018-12-01
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| Series: | Engineering |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2095809918304090 |