Microelectrode Array With Transparent ALD TiN Electrodes

Low noise platinum black or sputtered titanium nitride (TiN) microelectrodes are typically used for recording electrical activity of neuronal or cardiac cell cultures. Opaque electrodes and tracks, however, hinder the visibility of the cells when imaged with inverted microscope, which is the standar...

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Bibliographic Details
Main Authors: Tomi Ryynänen, Anssi Pelkonen, Kestutis Grigoras, Oili M. E. Ylivaara, Tanja Hyvärinen, Jouni Ahopelto, Mika Prunnila, Susanna Narkilahti, Jukka Lekkala
Format: Article
Language:English
Published: Frontiers Media S.A. 2019-03-01
Series:Frontiers in Neuroscience
Subjects:
MEA
ALD
TiN
Online Access:https://www.frontiersin.org/article/10.3389/fnins.2019.00226/full