Formation of high conductive nano-crystalline silicon embedded in amorphous silicon-carbide films with large optical band gap
High conductive phosphorus-doped nano-crystalline Si embedded in Silicon-Carbide (SiC) host matrix (nc-Si:SiC) films were obtained by thermally annealing doped amorphous Si-rich SiC materials. It was found that the room conductivity is increased significantly accompanying with the increase of doping...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-10-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4965922 |