A Bond-Wire Drift Offset Minimized Capacitance-to-Digital Interface for MEMS Accelerometer with Gain-Enhanced VCO-Based Quantization and Nested Digital Chopping Feedback Loops

A Bond-Wire Drift Offset Minimized Capacitance-to-Digital Interface for MEMS Accelerometer with Gain-Enhanced VCO-Based Quantization and Nested Digital Chopping Feedback Loops

This paper presents an output offset minimized capacitance-to-digital interface for a MEMS accelerometer. With a gain-enhanced voltage-controlled oscillator (VCO)-based quantization loop, the interface is able to output a digital signal with improved dynamic range. For optimizing the output offset c...

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Bibliographic Details
Main Authors: Fanyang Li, Tao Yin, Haigang Yang
Format: Article
Language:English
Published: MDPI AG 2021-07-01
Series:Sensors
Subjects:
MEMS
accelerometer
VCO
digital chopping
offset
bond-wire
Online Access:https://www.mdpi.com/1424-8220/21/14/4627

Internet

https://www.mdpi.com/1424-8220/21/14/4627

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